Interferometry Annotated Bibliography


Biegen, J. 1994. Determination of the phase change on reflection from two-beam interference. Applied Optics 19(21): 1690–2.

Bhushan, B., J. Wyant, and C. Koliopoulos. 2002. Measurement of surface topography of magnetic tapes by Mirau interferometry. Applied Optics 24 (10): 1489–97.

Blunt, R. 2006. White light interferometry – a production worthy technique for measuring surface roughness on semiconductor wafers. The International Conference on Compound Semiconductor Manufacturing Technology: 59–62.

Caber, P. 1993. Interferometric profiler for rough surfaces. Applied Optics 32(19): 3438–41.

Gillespie, A. 1994. Optical information processing. Physics Education 29: 127–34.

Ichioka, Y., T. Iwaki, and K. Matsuoka. 1996. Optical information processing and beyond. Proceedings of the IEEE 84 (5): 694–719.

Ishimaru, A., C. Le., Y. Kuga, J. Yea., K. Pak, and T. Chan. 1996. Interferometric technique for determining the average height profile of rough surfaces. Proceedings of the International Geoscience and Remote Sensing Symposium 4: 27–31.

Kino, G. and S. Chim. 1990. Mirau correlation microscope. Applied Optics 29(26): 3775–83.

Leith, E. and G. Swanson. 1990. Achromatic interferometers for white light optical processing and holography. Applied Optics 19(4): 638–44.

Olszak, A. 2000. Lateral scanning white-light interferometer. Applied Optics 39(22): 3906–13.

Ozaktas, H. 2005. Optical information processing: past, present, and future. The European Signal Processing Conference. [n.p.]

Psaltis, D. 2002. Coherent optical information systems. Science 298: 1359–63.

Schmit, J., and J. Wyant. 1998. Large field of view, high spatial resolution surface measurements. The Internatinal Conference On Metrology and Properties of Engineering Surfaces: 294–301.

Wyant, J. White light interferometry. 2002. 1 April. Orlando, Florida.

Zecchino, M., and A. Olszak. 2002. High speed surface measurement with lateral scanning white light interferometry.

Technical Notes

Veeco Instruments Inc.. 2003. Surface Measurement Parameters for Wyko Optical Profilers.

Zecchino, M., and A. Olszak. 2002. High speed surface measurement with lateral scanning white light interferometry.


Hariharan, P. 1992. Basics of interferometry. Boston: Academic Press.

Hariharan, P. 1985. Optical interferometry. Boston: Academic Press.

Hecht, E. 1975. Schaum's outlines of theory and problems of optics. New York: the McGraw-Hill Book Company, Inc.

Lynch, D. and W. Livingston. 1995. Color and light in nature. Cambridge:Cambridge University Press.

Meyer-Arendt, J. 1995. Introduction to classical and modern optics, fourth edition. New Jersey: Prentice-Hall, Inc.

Morgan, J. 1953. Introduction to Geometrical and Physical Optics. New York: the McGraw-Hill Book Company, Inc.

Veeco Metrology Group. 2003. WYKO NT8000 setup and operation guide. Tucson: Veeco Instruments, Inc.

Pedrotti, Frank and Leno, Pedrotti. 1987. Introduction to Optics. Englewood Cliffs: Prentice-Hall, Inc.

Shamir, J. 1999. Optical systems and processes. Bellingham: SPIE.

Smith, F. and J. Thomson. 1988. Optics, second edition. New York: John Wiley Sons Ltd.

Smith, F. and T. King. 2000. Optics and photonics: an introduction. New York: John Wiley Sons Ltd.

Wheadon, R. 1968. The principles of light and optics. London: Longmans, Green Co. Ltd.

Internet Resources

Wikipedia's interferometry page [1]

Glossary of terms related to metrology measurement [2]

Applied Optics [3]